I. Applications in Environmental Protection

Gas Separation and Purification

Turbo molecular pumps are widely used in gas analysis instruments for separating and purifying harmful gases in industrial emissions or environmental air. For example:

• Analyzing and separating greenhouse gases such as carbon dioxide and methane.

• Purifying trace harmful substances in the air, such as volatile organic compounds (VOCs).

Exhaust Gas Treatment Systems

In the treatment of industrial waste gases and nuclear tail gases, turbo molecular pumps, in conjunction with other vacuum equipment, remove polluted gases, ensuring the system's sealing and safety.

Water Quality Testing and Purification

In water quality testing instruments, turbo molecular pumps maintain a high-vacuum environment within the instruments, enhancing detection sensitivity for accurate analysis of trace pollutants in water.

II. Applications in New Materials

Thin-Film Deposition Technology

Turbo molecular pumps are key components in many thin-film preparation devices, such as magnetron sputtering, chemical vapor deposition (CVD), and physical vapor deposition (PVD). They quickly remove residual gases from the reaction chamber, providing a high-purity vacuum environment to ensure superior quality and uniformity of thin-film materials.

• Used in the production of semiconductor and optical thin films.

• Applied in the preparation of advanced materials like superconductors and ceramic coatings.

Nanomaterial Preparation

During the preparation of nanomaterials, turbo molecular pumps provide a high-vacuum environment, preventing contamination by impurities and enhancing material performance. Examples include the preparation of carbon nanotubes and graphene.

Advanced Energy Materials

In the development and production of energy materials such as lithium battery electrodes and solid-state electrolytes, turbo molecular pumps ensure stable reaction conditions, improving product consistency.

Material Characterization and Analysis

Turbo molecular pumps are often integrated into high-vacuum equipment like scanning electron microscopes (SEM) and transmission electron microscopes (TEM) to study the microstructure and properties of new materials.