1. Performance indicators

（1）Valve body leakage rate: metal square flange <1*10-8pa.l/s (rubber ring square flange valve body leakage rate: <1*10-7pa.l/s)

（2）Scope of use: 6*10E-8Pa-1*10E5Pa (rubber ring seal 6*10E-7Pa-1*10E5Pa)

（3） Air source pressure: 0.4-0.7MPa (4-7kgf/cm2)

（4）Fluid used: air (filtered by 40 micron filter)

（5）Inlet pipe: nylon or plastic pipe with outer diameter φ6mm

（6）Valve control: DC-24V or AC220V 3W

（7）Magnetic switch: 5-220V 100 mA

（8）Baking temperature: valve body <180℃ (in valve open state), cylinder and valve body connection <80℃

（9）Time required to open or close the valve: DN35-DN63＞5 seconds, DN100-DN250＞8 seconds

（10）Installation direction: It is recommended that the valve plate seal faces the pump or high vacuum side

（11）Pressure difference on both sides of the valve plate opening: ＜2000Pa

2. Installation dimensions